Imaging ellipsometry: quantitative analysis
Imaging ellipsometry: quantitative analysis
复制标题
DOI：
10.1002/pssa.200777855
复制
发表时间：
2008-04-01
影响因子：
2
通讯作者：
Clarkson, M. T.
中科院分区：
文献类型：
--
作者：
Asinovski, L.;Beaglehole, D.;Clarkson, M. T.
成像椭圆光度术 (IE) 将光学显微镜的空间分辨率与椭圆光度术的薄膜测量功能相结合。近年来它引起了人们的极大兴趣，并被广泛应用于从生物技术到半导体计量学等领域。传统上，IE 要么用作定性技术（与偏振显微镜或表面等离子共振 (SPR) 不同），通过“椭圆光度图像”显示表面拓扑变化，要么用作准定量技术，其中“椭圆光度图像”的变化用于推断薄膜厚度的变化。在本文中，我们从不同测量系统配置对定量 IE 测量的适用性的角度对不同的测量系统配置进行了简要的批判性回顾。我们讨论了能够实现真正定量 IE 测量的校准和校正方法。我们证明了快速可靠的定量 IE 可以实际实现。它是一致的，可以在许多应用中代替经典的单点椭圆测量法。 (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA，魏因海姆。
Imaging ellipsometry (IE) combines spatial resolution of optical microscopy with thin-film measurement capabilities of ellipsometry. It has gained significant interest in recent years and is been used for a wide range of applications from biotechnology to semiconductor metrology. Traditionally, IE is used either as a qualitative technique - not unlike polarized microscopy or Surface Plasmon Resonance (SPR) - with "ellipsometry images" showing surface topology variation, or as a quasi-quantitative technique where the change in "ellipsometry images" is used to deduce the change in film thickness. In this paper we give a brief critical review of different measurement systems configurations from the point of view of their fitness to quantitative IE measurement. We discuss the methods of calibration and correction that enable to achieve a truly quantitative IE measurement. We show that a fast and reliable quantitative IE can be practically implemented. It is consistent and can be used in lieu of a classical single point ellipsometry in many applications. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.