Modeling of an air-backed diaphragm in dynamic pressure sensors: Effects of the air cavity
Modeling of an air-backed diaphragm in dynamic pressure sensors: Effects of the air cavity
复制标题
动态压力传感器中的气背隔膜建模:气腔的影响
DOI:
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发表时间:
2014
期刊:
影响因子:
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通讯作者:
Miao Yu
中科院分区:
文献类型:
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作者:
Haijun Liu;D. Olson;Miao Yu