Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors
Highly ordered nanowire arrays on plastic substrates for ultrasensitive flexible chemical sensors
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DOI：
10.1038/nmat1891
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发表时间：
2007-05-01
期刊：
影响因子：
41.2
通讯作者：
Heath, James R.
中科院分区：
文献类型：
--
作者：
McAlpine, Michael C.;Ahmad, Habib;Heath, James R.
开发一种在柔性塑料上集成高性能半导体的稳健方法，可以在基础研究和新应用中开辟令人兴奋的途径。一个至关重要的领域是化学和生物传感，如果在生物相容性基底上实现，可能会在植入式或可穿戴式监测系统中取得突破。半导体纳米线（和纳米管）是特别敏感的化学传感器，因为它们的高表面积与体积比。在这里，我们提出了一个可扩展的和并行的过程，用于将数百个预对准的硅纳米线转移到塑料上，以产生用于低功耗传感器芯片的高度有序的薄膜。纳米线是优秀的场效应晶体管，作为传感器，对有害污染物NO2的灵敏度为十亿分之一。我们还使用SiO2表面化学构建了一个“纳米电子鼻”库，它可以通过分布式响应区分丙酮和己烷蒸气。出色的传感性能加上可弯曲的塑料可以为便携式，可穿戴甚至可植入传感器提供机会。
The development of a robust method for integrating high-performance semiconductors on flexible plastics could enable exciting avenues in fundamental research and novel applications. One area of vital relevance is chemical and biological sensing, which if implemented on biocompatible substrates, could yield breakthroughs in implantable or wearable monitoring systems. Semiconducting nanowires (and nanotubes) are particularly sensitive chemical sensors because of their high surface-to-volume ratios. Here, we present a scalable and parallel process for transferring hundreds of pre-aligned silicon nanowires onto plastic to yield highly ordered films for low-power sensor chips. The nanowires are excellent field-effect transistors, and, as sensors, exhibit parts-per-billion sensitivity to NO2, a hazardous pollutant. We also use SiO2 surface chemistries to construct a 'nano-electronic nose' library, which can distinguish acetone and hexane vapours via distributed responses. The excellent sensing performance coupled with bendable plastic could open up opportunities in portable, wearable or even implantable sensors.