Microarrays of silicon-based light emitters for novel biosensor and lab-on-a-chip applications
Microarrays of silicon-based light emitters for novel biosensor and lab-on-a-chip applications
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DOI：
10.1016/j.optmat.2004.08.062
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发表时间：
2005-02
影响因子：
3.9
通讯作者：
L. Rebohle;T. Gebel;R. Yankov;T. Trautmann;W. Skorupa;Jiaming Sun;G. Gauglitz;R. Frank
中科院分区：
文献类型：
--
作者：
L. Rebohle;T. Gebel;R. Yankov;T. Trautmann;W. Skorupa;Jiaming Sun;G. Gauglitz;R. Frank
我们已经证明了由离子束合成的含锗纳米晶体的热生长sio2薄膜的强紫色电致发光（EL）。概述了含有富锗纳米团簇氧化物膜的ITO/SiO2/Al发光器件的电学和光学特性。基于硅的局部氧化（LOCOS）的优化方案已经开发和测试成功。采用标准的光刻技术，形成了直径为300μm、相邻器件间距为500μm的4×6发光器件阵列。生物分析已按照基于荧光的检测程序进行。与标准的诊断情况不同，光源通常是激光，必要的空间分辨率由CCD相机提供，我们的光源足够小，可以立即确保高分辨率，同时允许单个廉价的Si二极管检测其光发射。讨论了全硅光源与微阵列、小型化传感器和芯片实验室系统的相关性。最后给出了含Tb的si基光源的EL光谱。
We have demonstrated intense violet electroluminescence (EL) from thermally-grown SiO2films containing Ge nanocrystals produced by ion beam synthesis. An outline is given of the electrical and optical characteristics of ITO/SiO2/Al light-emitting devices incorporating Ge nanocluster-rich oxide films. Optimization schemes based on the use of local oxidation of Si (LOCOS) have been developed and tested successfully. Arrays of 4×6 light-emitting devices with a diameter of 300μm and spacing of 500μm between the adjacent devices have been formed using standard lithography patterning. Bioanalyses have been carried out following fluorescent-based detection procedures. As distinct from the standard case of diagnostics in which the light source is typically a laser and the necessary spatial resolution is provided by a CCD camera, our light sources are small enough to immediately ensure high resolution while permitting their light emission to be detected by single inexpensive Si diodes. The relevance of the all-Si light sources to microarray, miniaturized sensor and lab-on-a-chip systems for point-of-care diagnostics is discussed. Finally, first EL spectra of Si-based light sources containing Tb are shown.