Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes
Monolithic CMOS multi-transducer gas sensor microsystem for organic and inorganic analytes
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DOI：
10.1016/j.snb.2007.03.035
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发表时间：
2007-10-01
影响因子：
8.4
通讯作者：
Hierlemann, A.
中科院分区：
文献类型：
--
作者：
Li, Y.;Vancura, C.;Hierlemann, A.
提出了一种单片集成的多传感器检测有机和无机气体的微系统。该系统包括两个基于电容式和重量传感器的聚合物传感器阵列、一个基于金属氧化物的传感器阵列、各自的驱动和信号处理电子设备以及一个数字通信接口(见第一图)。该芯片采用了0.8微米的工业互补金属氧化物半导体(CMOS)工艺，并进行了后续的CMOS微机械加工。用单芯片多传感器系统实现了有机和无机目标分析物的同时检测。该系统非常灵活，可以提供不同的感兴趣的信息：例如，电容式传感器可以充当湿度传感器，以处理基于金属氧化物的传感器对水的交叉敏感性，或者电容式传感器可以涂覆不同厚度的聚合物层，以检测有机挥发物，即使在水的背景中也是如此。多传感器方法提供了丰富的信息，可用于提高系统在气体检测中的识别能力和性能。(C)2007 Elsevier B.V.保留所有权利。
A monolithically integrated multi-transducer microsystem to detect organic and inorganic gases is presented. The system comprises two polymer-based sensor arrays based on capacitive and gravimetric transducers, a metal-oxide-based sensor array, the respective driving and signal processing electronics and a digital communication interface (see the first figure). The chip has been fabricated in industrial 0.8-mu m, complementary -metal-oxide-semiconductor (CMOS) technology with subsequent post-CMOS micromachining. The simultaneous detection of organic and inorganic target analytes with the single chip multi- transducer system has been demonstrated. The system is very flexible and can provide different information of interest: the capacitive sensors can, e.g., act as humidity sensors to deal with the cross-sensitivity of the metal-oxide-based sensors to water, or the capacitive sensors can be coated with differently thick polymer layers to detect organic volatiles even in a background of water. The multi-transducer approach provides a wealth of information that can be used to improve the system discrimination capability and performance in gas detection. (C) 2007 Elsevier B.V. All rights reserved.