A low-noise interface circuit for MEMS vibratory gyroscope
A low-noise interface circuit for MEMS vibratory gyroscope
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一种MEMS振动陀螺仪低噪声接口电路
DOI：
10.1109/icsict.2010.5667561
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发表时间：
2010
期刊：
影响因子：
--
通讯作者：
Dunshan Yu
中科院分区：
文献类型：
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作者：
Ran Fang;Wengao Lu;Chang Liu;Zhongjian Chen;Yuan Ju;Guannan Wang;L. Ji;Dunshan Yu
设计并实现了一种用于MEMS振动陀螺仪读出和控制的CMOS专用集成电路。采用斩波频率为2MHz的正弦斩波稳频技术，实现了低噪声设计，有效地抑制了低频噪声。提出了一种驱动模式下的闭环控制方法。芯片采用0.35µm标准CMOS工艺制作，面积为2.5×2.5mm2。在闭环控制条件下，用振动陀螺仪进行了测试，测试结果表明，在5V单电源供电下，在100Hz带宽内，检测分辨率为6aF。
A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35µm standard CMOS process with an area of 2.5×2.5mm2. The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply.