Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings

Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings
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DOI:
10.1116/1.3293232
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发表时间:
2010-01
期刊:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
影响因子:
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通讯作者:
K. Whitehead;P. Kelly;H. Li;J. Verran
K. Whitehead;P. Kelly;H. Li;J. Verran
中科院分区:
其他
文献类型:
--
作者:
K. Whitehead;P. Kelly;H. Li;J. Verran

文献摘要

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氮化钛(TiN)是一种坚硬、耐磨的涂层材料,广泛应用于在磨料磨损环境中工作的部件。当与银共沉积时,涂层形成由嵌入TiN基质中的银纳米颗粒组成的纳米复合结构。采用共溅射法在光亮退火的不锈钢基体上沉积TiN/Ag涂层。通过控制靶材功率,薄膜的银含量在0 ~ 16.7at. %.使用扫描电子显微镜(结构)、能量色散X射线光谱(化学成分)、白色光轮廓测定法(粗糙度)、原子力显微镜(形貌)和物理化学(ΔGiwi、γs、γsLW、γsAB、γs+和γs−)对薄膜进行表征。银不均匀地分布在整个TiN基体中,并且增加TiN表面中的银含量导致相对于表面特征、晶粒尺寸和物理化学的表面纳米形貌的变化。特别是一个银…
Titanium nitride (TiN) is a hard, wear-resistant coating material, which is widely applied to components operating in an abrasive wear environment. When codeposited with silver, the coating forms a nanocomposite structure consisting of nanoparticles of silver embedded in a TiN matrix. TiN/Ag coatings were deposited by cosputtering onto bright annealed stainless steel substrates. By control of the target powers, the silver content of the films was varied in the range of 0–16.7 at. %. The films were characterized using scanning electron microscopy (structure), energy dispersive x-ray spectroscopy (chemical composition), white light profilometry (roughness), atomic force microscopy (topography), and physicochemistry (ΔGiwi, γs, γsLW, γsAB, γs+, and γs−). Silver was heterogeneously distributed throughout the TiN matrix, and increasing the silver content in the TiN surfaces resulted in changes in surface nanotopographies with respect to surface features, grain sizes, and physicochemistry. In particular, a silv...