Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon
Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon
复制标题
高空间频率激光诱导硅中周期性表面结构生成的表面等离子体激元模型
DOI：
10.1063/1.4730381
复制
发表时间：
2012
影响因子：
3.2
通讯作者：
K. König
中科院分区：
文献类型：
--
作者：
M. Straub;M. Afshar;D. Feili;H. Seidel;K. König
近年来，高空间频率的激光诱导表面结构已经在各种各样的微结构中产生。在硅亚波长波纹，其中一些功能周期低于100纳米，使用超快激光形成。我们证明了Si（100）表面，在超短脉冲激光的焦斑中产生致密的电子空穴等离子体，然后大量激发等离子体波，为这种高空间频率表面结构的形成提供了解释。所应用的Drude类模型包括载流子-载流子碰撞，并且与实验观察到的涟漪周期非常一致。
In recent years, high-spatial frequency laser-induced surfaces structures have been generated in a large variety of dielectrics. In silicon subwavelength ripples, some of which featured periodicities below 100 nm, were formed using ultrafast lasers. We demonstrate for Si(100) surfaces that generation of a dense electron-hole plasma in the focal spot of ultrashort-pulsed laser light followed by massive excitation of plasma waves provides an explanation for the formation of such high-spatial frequency surface structures. The applied Drude-like model includes carrier-carrier collisions and is in excellent agreement with the experimentally observed ripple period.
影响因子：
3.2
作者：
Dufft, D.;Rosenfeld, A.;Bonse, J.
通讯作者：
Bonse, J.