A white-light profiling algorithm adopting the multiwavelength interferometric technique
A white-light profiling algorithm adopting the multiwavelength interferometric technique
复制标题
一种采用多波长干涉技术的白光轮廓算法
DOI：
10.1117/12.559251
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
Calvin C. Chang
中科院分区：
文献类型：
--
作者：
H. Hsu;C. Tung;C. Kao;Calvin C. Chang
提出了一种用于扫描白光干涉测量的新的轮廓算法。传统的垂直扫描方法需要获取一系列的白光干涉图。然后，将所收集的干涉图的强度数据相对于纵坐标或扫描轴傅里叶变换到波数域，在该波数域中选择两个或更多个波数用于进一步计算。然后利用多波长位相展开技术求解表面轮廓。用Mirau型白光干涉仪在两套台阶高度标准上进行了初步实验。即使在白光源的光谱不是高斯分布的情况下，该算法也能很好地工作，而传统的峰值检测算法不是这样。
A new profiling algorithm is proposed for the scanning white-light interferometry. A series of white-light interferograms are acquired by traditional vertical scanning process. The collected intensity data of the interferograms are then Fourier-Transformed with respect to the ordinate, or the scanning axis, into the wave number domain, where two or more wave numbers are selected for further calculation. The multi-wavelength phase-unwrapping technique is then used to solve for the surface profile. Preliminary experiment has been carried out with a Mirau-type white-light interferometer on two sets of step-height standards. The proposed algorithm works as well even when the spectrum of the white-light source is not Gaussian distributed, while the conventional peak sensing algorithms do not.