Variable-Gap Silicon Photonic Waveguide Coupler Switch With a Nanolatch Mechanism
Variable-Gap Silicon Photonic Waveguide Coupler Switch With a Nanolatch Mechanism
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DOI：
10.1109/lpt.2013.2248354
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发表时间：
2013-04-01
影响因子：
2.6
通讯作者：
Hane, Kazuhiro
中科院分区：
文献类型：
--
作者：
Abe, Syotaro;Hane, Kazuhiro
报道了一种用于硅光子学中片上波导电路的具有纳米锁存机制的变间隙波导耦合开关的设计和制作。所提出的开关由两个400 nm宽260 nm厚的独立硅波导、三个30微米宽40微米长的梳状驱动器和一个纳米匹配机构组成。该纳米锁存机构由四个钩形锁存器组成，用于在大约100 nm的耦合器间隙处保持开启状态。研究了开关和锁存特性。在闭锁条件下，端口隔离度为17分贝。由于执行器的电容操作和纳米匹配机制，开关的功耗被最小化。
Design and fabrication of a variable-gap waveguide coupler switch with a nano latch mechanism are reported for on-chip waveguide circuits in Si photonics. The proposed switch consists of a coupler of two freestanding 400-nm-wide 260-nm-thick Si waveguides, three 30-mu m-wide 40-mu m-long comb-drive actuators, and a nanolatch mechanism. The nanolatch mechanism consists of four hook-shaped latches for maintaining a switch-on state at a coupler gap of around 100 nm. The switching and latching characteristics are investigated. The port isolation under the latch-on condition is found to be 17 dB. Due to the capacitive operation of the actuators and the nanolatch mechanism, power consumption of the switch is minimized.