Intergrated resonant cantilever sensors with 2nd torsion-mode for fg-level resoluble biomedical detection
Intergrated resonant cantilever sensors with 2nd torsion-mode for fg-level resoluble biomedical detection
复制标题
具有第二扭转模式的集成谐振悬臂梁传感器，用于 fg 级可溶生物医学检测
DOI：
10.1109/memsys.2007.4433026
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
Haitai Yu
中科院分区：
文献类型：
--
作者：
Dazhong Jin;Xinxin Li;Zhixiang Zhang;Hanhan Bao;Yuelin Wang;Jian Liu;Haitai Yu
提出了一种集成了洛伦兹力激励和压阻传感元件的硅微悬臂谐振传感器，用于超分辨生物医学检测。高q因子、高质量灵敏度和高质量分辨率激发了第二种扭转共振模式。传感器设计制作完成后，通过生物素-亲和素特异性结合测试了传感器的传感性能。通过对肝癌抗原甲胎蛋白（AFP）的ng/mL水平的免疫传感实验，该传感器有望用于癌症早期预后。
Presented is a silicon microcantilever resonant sensor with Lorentz-force exciting and piezoresistive sensing elements integrated for ultra-resoluble biomedical detection. A 2nd torsional resonance mode is excited for high Q-factor, high mass sensitivity and high mass resolution. After the sensor design and fabrication, the sensing properties are tested by biotin-avidin specific binding. With ng/mL level immuno-sensing experiment for the hepatoma antigene of AFP, the sensor shows promise for cancer early-stage prognosis.