Design of a gain scheduled PID controller for precision stage in lithography
Design of a gain scheduled PID controller for precision stage in lithography
复制标题
光刻精密台增益调度PID控制器的设计
DOI：
10.1109/icma.2009.5246178
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Jung
中科院分区：
文献类型：
--
作者：
Mun;Jung
本文提出了一种使用均方根（RMS）的新型 PID 增益调度方法，用于光刻工艺中的精确定位阶段。调节控制方式的低扰动是一个非常重要的问题，它在很大程度上影响光刻工艺的质量。调节控制过程中的扰动也称为阶段振荡，如果控制带宽减小，通常有减少的趋势，但在这种情况下，控制系统对小的电噪声甚至建筑物的结构振动的抵抗力很弱。本文提出了一种使用实时 RMS 转换器芯片的增益调度控制方案，以最大限度地减少级振荡并最大限度地提高抗扰性。为了测试所提出的控制方案，设计了气悬浮精密平台并用于实验。还通过 MATLAB 进行仿真，对平台和控制器进行建模和分析。仿真和实验结果验证了所提出的精密定位平台控制方案与传统PID控制器相比的有效性。
This paper presents a novel PID gain scheduling method using root mean square (RMS) for precise positioning stage in lithography process. Low perturbation in regulating control mode is a very important issue and it largely affects the quality of lithography process. Perturbation during regulation control also called as stage hunting, and usually there is a tendency of decrease, if the control bandwidth is reduced, but in this case, the control system is far weak against a small electrical noise or even structural vibration of the building. In this paper, a gain scheduling control scheme using real time RMS converter chip is proposed to minimize stage hunting and maximize immunity for disturbances. For the test of the proposed control scheme, an air levitated precision stage was designed and used in experiment. Also simulations were conducted by MATLAB to model and analyze the stage and controller. The simulation and experimental results are presented to verify the effectiveness of the proposed control scheme for precision positioning stage compared with conventional PID controller.