A simple solution to systematic errors in density determination by X-ray reflectivity: The XRR-density evaluation (XRR-DE) method
A simple solution to systematic errors in density determination by X-ray reflectivity: The XRR-density evaluation (XRR-DE) method
复制标题
X 射线反射率密度测定中系统误差的简单解决方案：XRR 密度评估 (XRR-DE) 方法
DOI：
10.1016/j.apsusc.2006.05.067
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发表时间：
2006
影响因子：
6.7
通讯作者：
L. Depero
中科院分区：
文献类型：
--
作者：
P. Bergese;E. Bontempi;L. Depero
X射线反射率（XRR）是一种无损、准确、快速的薄膜密度测量技术。实际上，样品-测角仪对准是XRR密度测定中的关键实验因素和最重要的误差源。使用商用单波长X射线反射计，对准难以控制，并且在很大程度上取决于操作员。在目前的工作中，未对准的密度评价误差的贡献进行了讨论，并提出了一种新的程序（命名为XRR密度评价或XRR-DE方法），以尽量减少这个问题。该方法允许通过从适当的非镜面XRR数据集外推正确的密度值来克服对准步骤。该程序独立于操作员，适用于商业单波长X射线反射仪。为了测试XRR-DE方法，使用TiO 2和SrTiO 3的单晶。在这两种情况下，测定的密度与标称密度的差异小于5.5%。因此，XRR-DE方法可以成功地应用于评估目前仅使用光学反射率的薄膜的密度。其优点在于，该方法可以被认为是与厚度无关的。
X-ray reflectivity (XRR) is a non-destructive, accurate and fast technique for evaluating film density. Indeed, sample-goniometer alignment is a critical experimental factor and the overriding error source in XRR density determination. With commercial single-wavelength X-ray reflectometers, alignment is difficult to control and strongly depends on the operator. In the present work, the contribution of misalignment on density evaluation error is discussed, and a novel procedure (named XRR-density evaluation or XRR-DE method) to minimize the problem will be presented. The method allows to overcome the alignment step through the extrapolation of the correct density value from appropriate non-specular XRR data sets. This procedure is operator independent and suitable for commercial single-wavelength X-ray reflectometers. To test the XRR-DE method, single crystals of TiO2and SrTiO3were used. In both cases the determined densities differed from the nominal ones less than 5.5%. Thus, the XRR-DE method can be successfully applied to evaluate the density of thin films for which only optical reflectivity is today used. The advantage is that this method can be considered thickness independent.