Formation of lithium niobate-tantalate waveguides
Formation of lithium niobate-tantalate waveguides
复制标题
铌酸锂-钽酸锂波导的形成
DOI：
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发表时间：
1975
期刊：
影响因子：
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通讯作者：
J. Hammer
中科院分区：
文献类型：
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作者：
W. Phillips;J. Hammer
用一种简单的工艺制成了具有强电光系数的低损耗扩散钽酸锂波导。这些波导的形成通过在低温下将Nb金属膜转化为Nb氧化物，然后在约1100°C下将Nb扩散到LiTaO3衬底中来进行。扩散层具有高斯成分分布。其测量的折射率是一致的，通过LiNbO3和LiTaO3的折射率之间的插值计算。
Low loss diffused lithium niobate-tantalate waveguides exhibiting strong electrooptic coefficients have been made by a simple processing procedure. The formation of these waveguides takes place by the conversion of a Nb metal film to Nb oxide at a low temperature, followed by diffusion of Nb into the LiTaO3 substrate at about 1100°C. The diffused layer has a Gaussxan composition profile. Its measured refractive index is consistent with that calculated by interpolation between the indices of LiNbO3, and LiTaO3.