Nanodiamond-coated silicon cantilever array for chemical sensing
Nanodiamond-coated silicon cantilever array for chemical sensing
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DOI：
10.1063/1.3484277
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发表时间：
2010-08-30
影响因子：
4
通讯作者：
Jackman, Richard B.
中科院分区：
文献类型：
--
作者：
Ahmad, Rezal K.;Parade, Ana Carolina;Jackman, Richard B.
金刚石作为微机电化学传感器的材料具有有吸引力的特性，但与硅相比难以加工。这里描述了一种将爆炸产生的纳米金刚石附着到预制和安装的硅悬臂装置上的方法。结果表明，由于弹簧常数较高，与单独使用 Si 相比，该混合器件的谐振频率降低了约 10%。暴露于 2,4-二硝基甲苯会导致容易观察到的共振频率降低。讨论了这些观察结果背后的机制，并强调了这种形式的混合悬臂结构在化学传感器应用中的前景。 2010年美国物理研究所。 [doi:10.1063/1.3484277]
Diamond offers attractive properties as a material for microelectromechanical chemical sensors but is difficult to process in comparison with silicon. Here a method for attaching detonation-derived nanodiamonds to prefabricated and mounted Si cantilever devices is described. It is shown that this hybrid device has a resonant frequency shifted down, compared to Si alone, by around 10% due to a higher spring constant. Exposure to 2,4-dinitrotoluene leads to an easily observed decrease in resonant frequency. The mechanisms behind these observations are discussed and the promise for this form of hybrid cantilever structure for chemical sensors applications highlighted. 2010 American Institute of Physics. [doi:10.1063/1.3484277]