Nucleation Enhancement of Diamond via Electron Cyclotron Resonance Plasma
Nucleation Enhancement of Diamond via Electron Cyclotron Resonance Plasma
复制标题
通过电子回旋共振等离子体增强金刚石成核
DOI：
10.1143/jjap.38.l65
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发表时间：
1999
影响因子：
1.5
通讯作者：
Shui
中科院分区：
文献类型：
--
作者：
Chao Sun;Wenjun Zhang;Jie Yang;Chun‐Sing Lee;I. Bello;Shui
发展了一种基于电子回旋共振微波等离子体的金刚石成核技术。在未经处理的镜面抛光的Si衬底上实现了高于108个核/cm 2的成核密度。将这种成核方法与普通微波等离子体化学气相沉积法相结合，得到了均匀的金刚石薄膜。采用原子力显微镜、拉曼光谱和扫描电子显微镜对成核和生长阶段后样品的相组成和形貌进行了表征。
A novel nucleation technique based on electron cyclotron resonance microwave plasma was developed to grow diamond films. A nucleation density higher than 108 nuclei/cm2 was achieved on an untreated, mirror-polished Si substrate. Uniform diamond films were obtained by combining this nucleation method with growth by the common microwave plasma chemical vapor deposition method. Atomic force microscopy, Raman spectroscopy and scanning electron microscopy were used to characterize the phase composition and morphology of the samples after the nucleation and growth stages.