Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System
Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System
复制标题
自适应模糊PID控制器在纳米级精密运动平台系统中的应用
DOI：
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发表时间：
2011
期刊：
影响因子：
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通讯作者：
Zhu Yu
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文献类型：
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作者：
Zhu Yu
针对常规PID控制器在纳米级运动控制中存在的超调抑制、定位精度和稳定性之间的矛盾，将自适应模糊PID控制器应用于纳米级精密运动系统中。根据纳米级运动控制的特点和大量实际整定得到的一组PID参数，提出了一组模糊集、模糊规则和模糊域。实验结果表明，该控制器能有效地改善系统的动态性能，抑制超调，且控制器具有良好的鲁棒稳定性，成功地将定位精度提高到±10 nm。实验证明，所提出的模糊PID控制器和模糊规则构造是有效和可行的。
According to the conflicts among overshoot restraint,positioning precision and stability of normal PID controller in nano-scale motion control,the adaptive fuzzy PID controller is applied to the nano-scale pricision motion system.Base on the characters of nano-scale motion control and a group of PID parameters from a mass of practical tuning,a set of fuzzy sets,fuzzy rules and fuzzy domain are proposed.The experiment result shows that the controller is effective to improve the dynamic performance and restrain the overshoot,and the controller has good robust stability and successfully improve the positioning precision to ±10 nm.And it is proved that the fuzzy PID controller and fuzzy rules building mentioned are effective and feasible.