Off-axis laser deposition of YBa2Cu3O7-δ thin films
Off-axis laser deposition of YBa2Cu3O7-δ thin films
复制标题
YBa2Cu3O7-δ 薄膜的离轴激光沉积
DOI：
10.1063/1.107951
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发表时间：
1992
影响因子：
4
通讯作者：
G. Saemann
中科院分区：
文献类型：
--
作者：
B. Holzapfel;B. Roas;L. Schultz;P. Bauer;G. Saemann
我们报道了用一种新的激光沉积几何形状制备YBa2Cu3O7−δ薄膜，即所谓的离轴激光沉积。结合基于辐射的衬底加热，这导致了c轴取向，外延YBa2Cu3O7−δ薄膜在77 K和零场下的临界电流密度超过106 A/cm2，表面质量非常好，完全没有观察到的激光液滴。原子力显微镜证明，在至少10×10 μm2的面积上，表面粗糙度<80 A。利用这种离轴几何结构，可以同时涂覆衬底的两面，从而提供双面薄膜沉积的一步工艺。两种YBa2Cu3O7−δ薄膜在衬底上表现出相同的超导特性。
We report on YBa2Cu3O7−δ thin‐film preparation by a new laser deposition geometry, the so‐called off‐axis laser deposition. Combined with radiation‐based substrate heating, this results in c‐axis oriented, epitaxial YBa2Cu3O7−δ thin films with critical current densities above 106 A/cm2 at 77 K and zero field and an exceptionally good surface quality, with complete absence of the otherwise observed laser droplets. As proved by atomic force microscopy, the surface roughness is <80 A over an area of at least 10×10 μm2. Using this off‐axis geometry it is possible to coat both sides of a substrate simultaneously, providing a one‐step process in double‐sided thin‐film deposition. Both YBa2Cu3O7−δ films on the substrate show identical superconducting properties.