Distorted colloidal arrays as designed template
Distorted colloidal arrays as designed template
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DOI：
10.1088/0957-4484/26/3/035301
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发表时间：
2015-01
期刊：
影响因子：
3.5
通讯作者：
Ye Yu;Ziwei Zhou;H. Möhwald;Bin Ai;Zhiyuan Zhao;Shunsheng Ye;Gang Zhang
中科院分区：
文献类型：
--
作者：
Ye Yu;Ziwei Zhou;H. Möhwald;Bin Ai;Zhiyuan Zhao;Shunsheng Ye;Gang Zhang
本文采用电感耦合等离子体反应离子刻蚀（ICP-RIE）技术制备了一种对称性破缺的新型胶体模板。通过适当而简单的处理，传统的对称非密排胶体模板演变成具有高度均匀性的椭圆形轮廓。这种独特的特征可以为胶体光刻和/或使用胶体颗粒作为构建块来制造具有破缺对称性的纳米/微米结构的其他光刻技术增加灵活性。除此之外，我们开发的新型胶体模板具有现场可调性，即从对称到不对称模板的可转化性。利用这种可调模板制备了具有偏心特征的三明治型颗粒。这种区别性特征将提供使用一组胶体模板制造具有独特非对称特征的结构的可能性，提供灵活性和广泛的可调性以使得能够使用胶体模板制造纳米/微米结构。
In this paper, a novel type of colloidal template with broken symmetry was generated using commercial, inductively coupled plasma reactive ion etching (ICP-RIE). With proper but simple treatment, the traditional symmetric non-close-packed colloidal template evolves into an elliptical profile with high uniformity. This unique feature can add flexibility to colloidal lithography and/or other lithography techniques using colloidal particles as building blocks to fabricate nano-/micro-structures with broken symmetry. Beyond that the novel colloidal template we developed possesses on-site tunability, i.e. the transformability from a symmetric into an asymmetric template. Sandwich-type particles with eccentric features were fabricated utilizing this tunable template. This distinguishing feature will provide the possibility to fabricate structures with unique asymmetric features using one set of colloidal template, providing flexibility and broad tunability to enable nano-/micro-structure fabrication with colloidal templates.