A calibrated fracture process zone model for thin film blistering
A calibrated fracture process zone model for thin film blistering
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DOI：
10.1007/978-94-017-2854-6_15
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发表时间：
1998-12
影响因子：
2.5
通讯作者：
A. Shirani;K. Liechti
中科院分区：
文献类型：
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作者：
A. Shirani;K. Liechti
这项工作的目的是研究的可行性，使用断裂过程区模型提取的粘合剂断裂能的薄膜上的厚基板从圆形水泡实验，涉及大量的非弹性变形的薄膜。通过在铝上气相沉积聚酰亚胺产生的界面形成了所进行的实验的基础。实验在体积控制下进行，同时测量压力历史和相应的三维气泡形状。该分析考虑了聚酰亚胺薄膜的非线性运动学和材料行为，并包括界面的牵引分离定律。通过比较测得的压力-体积响应和裂纹张开位移，以迭代的方式校准界面的牵引-分离定律。考虑到断裂发生在界面区，由所选的牵引-分离定律得到的粘着断裂能是合理的。它以Gent和Lewandowski（1987）和Chu等人（1992 a，B）进行的弹性分析（更新了运动学）得到的值为界。
The purpose of this work was to examine the feasibility of using fracture process zone models for extracting the adhesive fracture energy of thin films on a thick substrate from circular blister experiments that involve a substantial amount of inelastic deformation in the thin film. The interface produced by vapor depositing polyimide on aluminum formed the basis of the experiments that were conducted. The experiments were conducted in volume control while the pressure history and the corresponding three dimensional blister shape were measured. The analysis accounted for the nonlinear kinematics and material behavior of the polyimide film and included a traction-separation law for the interface. The traction-separation law for the interface was calibrated in an iterative manner by comparing measured pressure-volume responses and crack opening displacements. The adhesive fracture energy obtained from the selected traction-separation law was reasonable considering that fracture occurred in an interphase region. It was bounded by values that were obtained from elastic analyses (with updated kinematics) of the type performed by Gent and Lewandowski (1987) and Chu et al. (1992 a, b).