Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors
Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors
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DOI：
10.1088/1757-899x/65/1/012030
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发表时间：
2014-07
期刊：
影响因子：
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通讯作者：
Z. Al-Shibaany;J. Hedley;D. Huo;Zhongxu Hu
中科院分区：
文献类型：
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作者：
Z. Al-Shibaany;J. Hedley;D. Huo;Zhongxu Hu
由于其良好的压电性，在MEMS中得到了广泛的应用。提出了一种新型的谐振式生物传感器设计方案，并对其微加工工艺进行了研究。利用高精度的数控机床，以5种不同的主轴转速加工了一块Nb酸锂材料的样品，找出了加工这种脆性材料的最佳加工条件。用扫描电子显微镜对表面进行了定性的肉眼观察，利用光学表面轮廓仪和拉曼光谱对表面的应变进行了定量的研究。结果表明，主轴转速对锂离子电池正极材料的表面质量有显着影响，最佳工艺条件为70K rpm，得到了表面粗糙度为500 nm的应变表面。
Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness.