Graphene/3C-SiC Hybrid Nanolaminate.
Graphene/3C-SiC Hybrid Nanolaminate.
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DOI：
10.1021/acsami.5b09794
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发表时间：
2015-12
影响因子：
9.5
通讯作者：
Zhuang Hao;Bingping Yang;S. Heuser;N. Huang;Haiyuan Fu;Xin Jiang
中科院分区：
文献类型：
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作者：
Zhuang Hao;Bingping Yang;S. Heuser;N. Huang;Haiyuan Fu;Xin Jiang
在这项工作中，我们展示了一个一步的方法来创建石墨烯/3C-SiC纳米叠层结构，使用微波等离子体化学气相沉积技术。获得薄3C-SiC层和石墨烯片的逐层布置，其中各个3C-SiC层和石墨烯片的厚度分别为5-10 nm和2-5 nm。实现了3C-SiC和石墨烯片之间的紧密接触，并且纳米层压膜显示出96.1S/cm的高室温电导率。通过高分辨率透射电子显微镜（HRTEM）对纳米层压材料进行的专门结构分析表明，纳米层压材料的生长遵循迭代过程：在SiC层的中心区域的平面缺陷周围的优先石墨烯成核，导致SiC层的“分裂”;以及在被“分裂”之后SiC层的增厚。提出了一种基于动力学和热力学的生长机制。根据所提出的机制，可以通过操纵气相中的碳浓度来控制石墨烯/3C-SiC混合纳米层压材料的层厚度，这进一步得到了实验验证。石墨烯/3C-SiC混合纳米层压材料的高导电性、大表面积多孔结构、在不同基底（金属、Mo;半导体、Si和2 H-SiC;绝缘体、金刚石）上的可行集成以及纳米层压结构的其他前所未有的优点使其在机械、能源和传感器相关领域的应用非常有前景。
In this work, we demonstrate a one-step approach to create graphene/3C-SiC nanolaminate structure using microwave plasma chemical vapor deposition technique. Layer-by-layer arrangement of thin 3C-SiC layers and graphene sheets is obtained with the thicknesses of the individual 3C-SiC layers and graphene sheets being 5-10 nm and 2-5 nm, respectively. An intimate contact between 3C-SiC and the graphene sheets is achieved and the nanolaminate film shows a high room temperature conductivity of 96.1 S/cm. A dedicated structural analysis of the nanolaminates by means of high-resolution transmission electron microscopy (HRTEM) reveals that the growth of the nanolaminates follows an iterative process: preferential graphene nucleation around the planar defects at the central region of the SiC layer, leading to the "splitting" of the SiC layer; and the thickening of the SiC layer after being "split". A growth mechanism based on both kinetics and thermodynamics is proposed. Following the proposed mechanism, it is possible to control the layer thickness of the graphene/3C-SiC hybrid nanolaminate by manipulating the carbon concentration in the gas phase, which is further experimentally verified. The high electrical conductivity, large surface area porous structure, feasible integration on different substrates (metal, Mo; semiconductor, Si and 2H-SiC; insulator, diamond) of the graphene/3C-SiC hybrid nanolaminate as well as other unprecedented advantages of the nanolaminate structure make it very promising for applications in mechanical, energy, and sensor-related areas.