ELECTRICAL, OPTICAL AND ANNEALING CHARACTERISTICS OF ZNO-AL FILMS PREPARED BY SPRAY PYROLYSIS
ELECTRICAL, OPTICAL AND ANNEALING CHARACTERISTICS OF ZNO-AL FILMS PREPARED BY SPRAY PYROLYSIS
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DOI：
10.1016/0040-6090(91)90325-r
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发表时间：
1991-03-20
期刊：
影响因子：
2.1
通讯作者：
MALHOTRA, LK
中科院分区：
文献类型：
--
作者：
AKTARUZZAMAN, AF;SHARMA, GL;MALHOTRA, LK
通过喷雾热解醋酸锌和氯化铝溶液制备了掺铝氧化锌透明导电薄膜。详细研究了铝锌比从0到6at.%，基片温度从300℃到500℃，喷涂速度从5到16mlmin-1的影响。沉积的薄膜具有很高的电阻率和很高的可见光透过率。在氢气气氛中对沉积的薄膜进行退火处理，在不影响光学传输的情况下，显著降低了电阻率。最好的薄膜具有大约10(-3)欧米伽厘米的电阻率和大约85%的可见光透过率。初步研究表明，薄膜在硅烷和硅烷+氢等离子体中是稳定的。
Transparent conducting thin films of aluminium-doped zinc oxide have been prepared by spray pyrolysing a solution of zinc acetate and aluminium chloride. The effect of changing the aluminium-to-zinc ratio from 0 to 6 at.%, substrate temperature from 300 to 500-degrees-C and spray rate from 5 to 16 ml min-1 has been thoroughly investigated. As-deposited films have very high resistivity and high visible transmission. Annealing of the as-deposited film in a hydrogen atmosphere leads to a substantial reduction in resistivity without affecting the optical transmission. The best films have a resistivity of about 10(-3)-OMEGA cm and a visible transmission of about 85%. Preliminary studies indicate that the films are stable in silane and silane plus hydrogen plasma.