Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips
Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips
复制标题
DOI：
10.1063/1.3573776
复制
发表时间：
2011-04-04
影响因子：
4
通讯作者：
Chang, Pin
中科院分区：
文献类型：
--
作者：
Hsu, Feng-Chia;Hsu, Jin-Chen;Chang, Pin
在微机械声波谐振器中，通过锚进入基板的能量耗散可能导致低品质因数(Q)。为了消除锚点损耗的不良影响，提出了一种基于声子晶体(PC)带的微声波谐振器无损锚点的设计方案。引入带声禁带的PC条来抑制锚点损失，并用作杆式谐振器的悬浮体。数值分析表明，该方法可以有效地抑制声能量泄漏，提高谐振器内部的储能能力。一种具有最小锚点损耗的高Q谐振器是可望的。(C)2011年美国物理研究所。[DOI：10.1063/1.3573776]
In micromechanical acoustic-wave resonators, energy dissipation through the anchors into the substrates may result in a low quality (Q) factor. To eliminate the ill effect of anchor losses, a design of lossless anchor based on phononic crystal (PC) strips for the microacoustic-wave resonators is presented. PC strips with acoustic forbidden bands are introduced to suppress the anchor loss and to serve as the suspensions for bar-type resonators. Numerical analysis shows that the acoustic energy leak can be effectively suppressed and the stored energy inside the resonators can be enhanced. A high-Q resonator with minimized anchor loss is expected. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3573776]