Dust as fine electrostatic probes for plasma diagnostic
Dust as fine electrostatic probes for plasma diagnostic
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DOI：
10.1088/0741-3335/47/12b/s46
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发表时间：
2005-12
影响因子：
2.2
通讯作者：
A. Samarian;B. James
中科院分区：
文献类型：
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作者：
A. Samarian;B. James
在这里，我们提出了一种新的使用细粉尘诊断测量的鞘层中的平面射频放电和惯性静电约束（IEC）等离子体。由于尘埃电荷是一个函数的等离子体参数的数量，和尘埃电荷调整本身的变化，在等离子体条件瞬间，尘埃粒子可以被用作一个理想的诊断工具。这种诊断方法的一个主要优点是它的简单性，因为在扰动之后，只需要测量尘埃粒子的位置或其运动。这项技术只需要进入放电室，尘埃颗粒，激光照射它们，以及相机捕捉尘埃的运动。确定了鞘层轮廓随放电气压和功率的变化关系。得到了圆柱对称容性耦合射频放电和IEC等离子体中的径向电势分布。在径向IEC放电的离子通量的方向被发现。
Here we present a novel use of fine dust for diagnostic measurements in the sheath of a planar rf discharge and in the inertial electrostatic confinement (IEC) plasma. Since dust charge is a function of a number of plasma parameters, and the dust charge adjusts itself to changes in plasma conditions instantaneously, dust particles may be used as an ideal diagnostic tool. A major advantage of such a diagnostic approach is its simplicity as the only measurement of a position of a dust particle or its motion after a perturbation is necessary. This technique only requires access to a discharge chamber, dust particles, a laser to illuminate them and a camera to capture the motion of the dust. The dependences of the sheath profiles on the discharge pressure and power have been determined. The radial potential profiles in a cylindrically-symmetrical capacitively-coupled rf discharge and in an IEC plasma were obtained. The direction of the ion flux in the radial IEC discharge was found.