Molding of deep polydimethylsiloxane microstructures for microfluidics and biological applications
Molding of deep polydimethylsiloxane microstructures for microfluidics and biological applications
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DOI：
10.1115/1.2798038
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发表时间：
1999-02-01
影响因子：
1.7
通讯作者：
Toner, M
中科院分区：
文献类型：
--
作者：
Folch, A;Ayon, A;Toner, M
Here we demonstrate the microfabrication of deep (>25 mu m) polymeric microstructures created by replica-molding polydimethylsiloxane (PDMS)from microfabricated Si substrates. The use of PDMS structures in microfluidics and biological applications is discussed. We investigated the feasibility of two methods for the microfabrication of the Si molds: deep plasma etch of silicon-on-insulator (SOI) wafers and photolithographic patterning of a spin-coated photoplastic layer. Although the SOI wafers can be patterned at higher resolution we Sound that the inexpensive photoplastic yields similar replication fidelity. The latter is mostly limited by the mechanical stability of the replicated PDMS structures. As an example, we demonstrate the selective delivery of different cell suspensions to specific locations of a tissue culture substrate resulting in micropatterns of attached cells.
