Negative ion energy distributions in reactive HiPIMS
Negative ion energy distributions in reactive HiPIMS
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DOI：
10.1088/0022-3727/46/4/045204
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发表时间：
2013-01
期刊：
影响因子：
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通讯作者：
M. Bowes;P. Poolcharuansin;J. Bradley
中科院分区：
文献类型：
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作者：
M. Bowes;P. Poolcharuansin;J. Bradley
能量分辨质谱法已用于测量氩/氧气混合物中钛的高功率脉冲磁控溅射 (HiPIMS) 中负离子物质在多种不同放电条件下的时间平均能量和质量分布。发现放电中含有 O−、 、 TiO− 和离子，并给出了它们各自的能谱。氧负离子（O− 和 ）能量分布表现出三种广泛的能量群体（低、中和高能量），并讨论了它们的起源。发现高能峰值与 HiPIMS 脉冲稳定导通阶段期间的绝对目标电位相对应的值一致。将 O− 离子高能群体的形状与溅射粒子的理论汤普森能量分布和电流加权靶电位分布函数进行比较。已经对高能 O− 离子的衰减与压力-距离乘积的函数关系进行了研究。观察到随着基底区域中压力-距离乘积的增加，高能 O− 离子的强度呈指数下降，从而产生 2.2 × 10−19 m2 的 O− 与背景气体混合物相互作用的有效总横截面。
Energy-resolved mass spectrometry has been used to measure the time-averaged energy and mass distributions of negative ion species in high power impulse magnetron sputtering (HiPIMS) of titanium in an argon/oxygen gas mixture for a number of different discharge conditions. The discharges were found to contain O−, , TiO−, and ions and their respective energy spectra are presented. The oxygen negative ion (O− and ) energy distributions exhibit three broad energy populations (low, medium and high energy) and their origin is discussed. The high-energy peak is found to coincide with a value corresponding to the absolute target potential during the stable on-phase of the HiPIMS pulse. The shape of the high-energy population of O− ions is compared with both a theoretical Thompson energy distribution of sputtered particles and a current-weighted target potential distribution function. A study of the attenuation of high-energy O− ions as a function of the pressure–distance product has been performed. An exponential decrease in intensity of the high-energy O− ions with an increasing pressure–distance product in the substrate region is observed, yielding an effective total cross section of 2.2 × 10−19 m2 for O− interacting with the background gas mixture.