General framework for quantitative three-dimensional reconstruction from arbitrary detection geometries in TEM
General framework for quantitative three-dimensional reconstruction from arbitrary detection geometries in TEM
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DOI：
10.1103/physrevb.87.184108
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发表时间：
2013-05-13
影响因子：
3.7
通讯作者：
Koch, Christoph T.
中科院分区：
文献类型：
--
作者：
Van den Broek, Wouter;Koch, Christoph T.
在体育馆里。莱特牧师。109,245502(2012年)，提出了一种通过反演动态散射来恢复物体三维势分布的方法，并通过从模拟的原子分辨率透射电子显微镜图像重建来验证该方法的有效性。本文对光刻和扫描共聚焦电子显微镜进行了扩展，并用模拟进行了验证。最终，这将使显微镜在产生最佳重建的模式下操作成为可能，而不是使显微镜设置适应大多数重建算法中使用的样本-电子相互作用的线性近似。此外，还实现了从模拟原子分辨率的电子显微镜图像中同时估计目标和未知散焦。这是朝着实验性重建迈出的重要一步。
In Phys. Rev. Lett. 109, 245502 (2012), a method for retrieving the object's three-dimensional potential distribution by inverting the dynamical scattering was presented and validated by a reconstruction from simulated atomic resolution transmission electron microscopy (TEM) images. In this paper, an extension to ptychography and scanning confocal electron microscopy is demonstrated and validated with simulations. Ultimately, this will make it possible to operate the microscope in the mode that yields the best reconstruction instead of accommodating the microscope settings to the linear approximation to the specimen-electron interaction used in most reconstruction algorithms. Furthermore, simultaneous estimation of the object and the unknown defocus from simulated atomic resolution TEM images is attained. This is an important step towards experimental reconstructions.