Peak intensities in Auger electron spectroscopy for quantification: Relationship between differentiated spectral intensities and direct peak areas
Peak intensities in Auger electron spectroscopy for quantification: Relationship between differentiated spectral intensities and direct peak areas
复制标题
用于定量的俄歇电子能谱中的峰强度：微分光谱强度与直接峰面积之间的关系
DOI：
10.1116/6.0002487
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发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Mineharu Suzuki
中科院分区：
文献类型：
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作者：
Katsumi Watanabe;Daisuke Watanabe;K. Mamiya;S. Koizumi;N. Sanada;Mineharu Suzuki
在俄歇电子能谱中，利用高能量分辨率的直达谱和球形电容分析仪(SCA)进行定性分析。尽管它用于对差示光谱进行定量分析，但使用SCA测量的高能量分辨率光谱不同于使用柱面反射镜分析器进行常规能量分辨率测量获得的高能量分辨率光谱。当我们尝试应用直接光谱进行定量分析时，这不允许使用先前积累的用于差示光谱的分析参数，例如相对灵敏度因子。因此，我们澄清了俄歇直接光谱强度和微分光谱强度之间的关系，并定义了一个修正因子，使得可以利用由微分光谱给出的分析参数来指导光谱。为了估计对定量分析有贡献的直接光谱面积，用雪利法减去直接光谱的背景，类似于X射线光电子能谱中使用的光谱处理。校正因子表示为归一化峰面积与归一化差分峰-峰强度的比值，这是在每个实验室和任何仪器上实际测量和测定的。
In Auger electron spectroscopy, qualitative analyses are performed by using high-energy resolution direct spectra with a spherical capacitor analyzer (SCA). Although it is used to carry out quantitative analyses with differentiated spectra, high-energy resolution spectra measured with an SCA differ from those obtained with conventional energy resolution measurements using a cylindrical mirror analyzer. When we attempt quantitative analyses by applying direct spectra, this does not allow the use of previously accumulated analytical parameters for differentiated spectra, such as relative sensitivity factors. Therefore, we clarified the relationship between Auger direct spectral intensities and differentiated spectral intensities, and we defined a correction factor enabling the use of the analytical parameters given by differentiated spectra to direct spectra. To estimate the direct spectral area contributing to a quantitative analysis, the background of the direct spectrum is subtracted by the Shirley method, similar to the spectral treatment used in x-ray photoelectron spectroscopy. The correction factor is expressed as the ratio of the normalized peak area and normalized differentiated peak-to-peak intensity, which is actually measured and determined in every laboratory and with any instrument.