Ion beam induced nano-space reactions and nano-wire formation in polymers by high energy sub-μm heavy ion beams
Ion beam induced nano-space reactions and nano-wire formation in polymers by high energy sub-μm heavy ion beams
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DOI：
10.1016/j.surfcoat.2006.12.033
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发表时间：
2007-08-05
影响因子：
5.4
通讯作者：
Sakai, T.
中科院分区：
文献类型：
--
作者：
Tagawa, S.;Tsukuda, S.;Sakai, T.
利用亚微米空间分辨率的高能聚焦离子束，制备出隔离的纳米线，并将其置于衬底上。每一个穿透聚合物薄膜的带电粒子都会产生相应的纳米线，其长度正好反映了目标薄膜的厚度。聚焦离子束通过将每根纳米线的一端与衬底紧密连接，在衬底上形成位置选择性的纳米线或纳米线束。通过静电控制小光斑尺寸(phi) < 500 nm的离子束辐照聚合物薄膜，形成高空间分辨率< 500 nm的纳米线束图案。在离子束的低通量(< 10（9)个离子cm(-2)）下，使用原子力显微镜在衬底上以规则间隔的特定点上观察到孤立的纳米线。(C) 2007 Elsevier B.V.版权所有
A high energy focused ion beam with sub-mu m spatial resolution was used to produce isolated nano-wires which were planted on the substrate. Each charged particle penetrating into a polymer thin film gave a corresponding nano-wire, whose length reflected Precisely the thickness of the target film. Based on the tight connection of one end of each nano-wire on the substrate, the focused ion beam achieved position selective nano-wire or nano-wire bundle formation on the substrate. The ion beam, with the small spot size (phi) < 500 nm, was electrostatically controlled to irradiate the polymer thin films, leading to the patterns of nano-wire bundles with high spatial resolution < 500 nm. At a low fluence of the ion beam (< 10(9) ions cm(-2)), the isolated nano-wires were observed at specific points on the substrate spaced at regular intervals, using atomic force microscopy. (C) 2007 Elsevier B.V. All rights reserved.