Epitaxial Pb(Zrx,Ti1−x)O3 (0.30 ≤ x ≤ 0.63) films on (100)MgO substrates for energy harvesting applications
Epitaxial Pb(Zrx,Ti1−x)O3 (0.30 ≤ x ≤ 0.63) films on (100)MgO substrates for energy harvesting applications
复制标题
用于能量收集应用的 (100)MgO 基板上的外延 Pb(Zrx,Ti1−x)O3 (0.30 ≤ x ≤ 0.63) 薄膜
DOI：
10.1063/1.4754015
复制
发表时间：
2012
影响因子：
3.2
通讯作者：
S. Trolier
中科院分区：
文献类型：
--
作者：
C. Yeager;S. Trolier
压电能量收集系统作为低功率无线传感器的长期电源而受到关注。从弹性能量到电能的转换取决于压电电荷和电压系数的乘积;优化该品质因数是改进微机电能量收集装置的重要步骤。本文报道了在（100）Pt//（100）MgO衬底上，采用化学溶液沉积法生长的外延{001}Pb（ZrO 2，Ti 1 −x）O3薄膜的介电和压电性能与其组成的关系。发电品质因数在x = 0.52附近的组分中显示出最大的幅度，其中e31，f = −12 C/m2和er = 420。晶格参数被确定为[Zr]的函数，以评估何时与从Landau-Devonshire理论计算的单畴性质进行比较是适当的。此外，薄膜掺杂1原子。% Mn具有最高的观察到的优值，四倍…
Piezoelectric energy harvesting systems are of interest as a long-term power source for low-power wireless sensors. Transduction from elastic to electrical energy depends on the product of the piezoelectric charge and voltage coefficients; optimization of this figure of merit is an essential step towards improved microelectromechanical energy harvesting devices. This work reports on the composition dependence on the dielectric and piezoelectric properties of epitaxial {001}Pb(Zrx, Ti1−x)O3 films grown by chemical solution deposition and crystallized at 650 °C on (100)Pt//(100)MgO substrates for 0.63 ≤ x ≤ 0.30. The power generation figure of merit shows the greatest magnitude at compositions near x = 0.52, for which e31,f = −12 C/m2 and er = 420. Lattice parameters were determined as a function of [Zr] to assess when comparisons to single domain properties calculated from Landau-Devonshire theory were appropriate. Furthermore, films doped with 1 at. % Mn had the highest observed figure of merit, four time...