Atomic Force Microscopy (AFM) Analysis of an Object Larger and Sharper than the AFM Tip

Atomic Force Microscopy (AFM) Analysis of an Object Larger and Sharper than the AFM Tip
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DOI:
10.1017/s1431927619014697
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发表时间:
2019-10-01
影响因子:
2.8
通讯作者:
Kim, Seong H.
Kim, Seong H.
中科院分区:
工程技术4区
文献类型:
--
作者:
Chen, Zhe;Luo, Jiawei;Kim, Seong H.

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原子力显微镜(AFM)通常用于分析相对平坦的表面,其形貌特征小于AFM针尖的高度。在平坦表面上,它是相对容易找到的对象的利益和deconvolute成像伪影所造成的有限大小的AFM针尖。相比之下,AFM成像的三维物体远大于AFM针尖高度很少尝试,虽然它可以提供的地形信息,是不容易从二维成像,如扫描电子显微镜。在本文中,我们报告AFM测量的垂直安装的剃须刀刀片,这是更高,更尖锐的AFM针尖。在这种情况下,AFM高度数据,除了收集的数据周围的刀片的切割边缘,反映了AFM针尖的形状。顶点区域周围的高度数据实际上是AFM针尖和刀片切割边缘的卷积。基于计算机模拟模拟的AFM针尖扫描整个圆形样品,提出了一种简单的算法去卷积的AFM高度数据的物体比AFM针尖更高,更尖锐,并估计其有效曲率。
Atomic force microscopy (AFM) is typically used for analysis of relatively flat surfaces with topographic features smaller than the height of the AFM tip. On flat surfaces, it is relatively easy to find the object of interest and deconvolute imaging artifacts resulting from the finite size of the AFM tip. In contrast, AFM imaging of three-dimensional objects much larger than the AFM tip height is rarely attempted although it could provide topographic information that is not readily available from two-dimensional imaging, such as scanning electron microscopy. In this paper, we report AFM measurements of a vertically-mounted razor blade, which is taller and sharper than the AFM tip. In this case, the AFM height data, except for the data collected around the cutting edge of the blade, reflect the shape of the AFM tip. The height data around the apex area are effectively the convolution of the AFM tip and the blade cutting edge. Based on computer simulations mimicking an AFM tip scanning across a round sample, a simple algorithm is proposed to deconvolute the AFM height data of an object taller and sharper than the AFM tip and estimate its effective curvature.