Observation of a microwave bandgap in a one-dimensionally periodic low-pressure plasma structure
Observation of a microwave bandgap in a one-dimensionally periodic low-pressure plasma structure
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DOI：
10.1088/1742-6596/441/1/012011
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发表时间：
2013-06
期刊：
影响因子：
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通讯作者：
Kazunori Takahashi;K. Miyamoto
中科院分区：
文献类型：
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作者：
Kazunori Takahashi;K. Miyamoto
等离子体密度的一维周期性结构是由 15 Pa 氩气中的 400 kHz 电容耦合放电产生的。通过增加射频功率，最大密度可以增加到 1010–1011 cm−3 以上。在本构造中，较高密度层和较低密度层之间的密度比保持在约0.7。测量并简单计算GHz范围内微波的透过率。结果表明，在 3 GHz 附近存在带隙，该带隙源自周期性结构。
One-dimensionally periodic structure of plasma density is produced by a 400 kHz capacitively coupled discharge in 15 Pa argon. The maximum density can be increased up to above 1010–1011 cm−3 by increasing the rf power. The density ratio between the higher and lower density layers is maintained at about 0.7 in the present configuration. The transmittance of the microwave in the GHz range is measured and simply calculated. The results indicate the presence of the bandgap near about 3 GHz, which originates in the periodic structure.