Fundamental Optical Properties of Linear and Cyclic Alkanes: VUV Absorbance and Index of Refraction
Fundamental Optical Properties of Linear and Cyclic Alkanes: VUV Absorbance and Index of Refraction
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DOI：
10.1021/jp903435c
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发表时间：
2009-08-20
影响因子：
2.9
通讯作者：
Willson, C. Grant
中科院分区：
文献类型：
--
作者：
Costner, Elizabeth A.;Long, Brian K.;Willson, C. Grant
已经收集了一系列直链和环状烷烃的VUV吸光度和折射率数据，以了解电子激发波长（或吸光度边缘），折射率和分子结构之间的关系。线性和环状烷烃的同系吸收边和指数随碳数的增加而增加。复杂环烷烃的光学性质不随碳数的增加而可预测地变化，而是取决于除了烃尺寸之外的烃结构的变化。这类化合物的基本光学性质的理解是直接适用于193 nm浸没式光刻的高折射率和低吸光度流体的识别。
VUV absorbance and index of refraction data for a series of linear and cyclic alkanes have been collected in order to understand the relationship between the electronic excitation wavelength (or absorbance edge), index of refraction, and molecular structure. The absorbance edge and index for a homologous series of both linear and cyclic alkanes increase with increasing carbon number. The optical properties of complex cycloalkanes do not vary predictably with increasing carbon number but instead depend on variations in the hydrocarbon structure in addition to hydrocarbon size. An understanding of the fundamental optical properties of this class of compounds is directly applicable to the identification of a high index and low-absorbance fluid for 193 nm immersion lithography.