Fabrication and characterization of titanium-alloy 3D printed solenoid inductors and their sensor applications
Fabrication and characterization of titanium-alloy 3D printed solenoid inductors and their sensor applications
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DOI：
10.1088/2631-8695/ac008c
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发表时间：
2021-05
影响因子：
1.7
通讯作者：
Jun Ying Tan;Mark A. Ciappesoni;Sung Jin Kim;J. Kim
中科院分区：
文献类型：
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作者：
Jun Ying Tan;Mark A. Ciappesoni;Sung Jin Kim;J. Kim
3D打印的最新进展带来了人们对通过探索复杂的3D结构来开发各种应用中的功能设备的许多兴趣。本文介绍了第一个全金属印刷的独立式3D螺线管微电感，该微电感使用高功率激光器和生物兼容的钛合金。利用60μm分辨率的自动龙门激光系统直接打印6Al-4V细粉基钛，在没有任何衬底的情况下形成电感。打印并表征了作为试验台的无衬底10圈螺线管，并进一步探索了20圈和40圈电感的额外设计。电感的导线被设计成具有700微米的正方形截面和300微米的绕组间隙。研制成功的10圈钛合金电磁铁电感在0.3 MHz时的平均电感为130nH，低频电阻为0.8欧姆，在30 MHz时的品质因数为10.5。在10圈电感上额外电沉积铜证明了与传统微机械加工工艺的兼容性。独立电感印刷方法节省了相当大的体积，其中传统的衬底尺寸通常比器件的体积更大。此外，独立电感还可以直接用作传感器设备。给出了使用10圈和19圈圆形边缘电磁感应器的力-位移传感应用实例。
Recent progress in 3D printing has brought many interests in developing functional devices in various applications by enabling the exploration of complex 3D structures. This paper presents the first fully metal printed standalone 3D solenoid microinductors using a high-power laser with a biocompatible Ti-alloy. Fine powder-based 6AL-4V Eli Titanium was directly printed using an automated gantry laser system with 60 μm resolution to form the inductors without any substrate. A substrate-less 10-turn solenoid as a testbed was printed out and characterized, and additional designs of 20 and 40 turn inductors were further explored. The wire of the inductor was designed to have a 700-micron square cross-section and a winding gap of 300 microns. The successfully fabricated 10-turn titanium-alloy solenoid inductor showed an average inductance of 130 nH, a low-frequency resistance of 0.8 ohms at 0.3 MHz, and a quality factor of 10.5 at 30 MHz respectively. Additional electrodeposition of copper to the 10-turn inductor demonstrated process compatibility with the conventional micromachining process. The standalone inductor printing method saves a significant volume from where the conventional substrate dimensions often take more than the volume of the device. Also, the standalone inductor can directly be used as a sensor device. Examples of force-displacement sensing applications were presented using the 10-turn and 19-turn round edge solenoid inductors.