Effects of titanium and tantalum adhesion layers on the properties of sol-gel derived SrBi2Ta2O9 thin films
Effects of titanium and tantalum adhesion layers on the properties of sol-gel derived SrBi2Ta2O9 thin films
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钛和钽粘附层对溶胶-凝胶法衍生的 SrBi2Ta2O9 薄膜性能的影响
DOI：
10.1063/1.1492015
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发表时间：
2002
影响因子：
3.2
通讯作者：
Tiao
中科院分区：
文献类型：
--
作者：
C. Leu;Hung Tao Lin;Chengmin Hu;C. Chien;Ming;Ming;Tiao
研究了钛（Ti）和钽（Ta）粘附层对溶胶-凝胶法制备的SrBi 2 Ta 2 O 9（SBT）薄膜的铁电性能和微结构的影响。结果表明，来自粘附层的原子对SBT薄膜的微观结构和物理性能起着重要的作用。化学分析的电子能谱清楚地表明，在750 °C，1 min的热处理后，粘附层中的Ti和Ta原子都有向外扩散到下电极Pt膜表面的行为。各种向外扩散的物种确实导致了SBT膜的不同性质，这一点由表面分析和极化电场（P-E）测量的结果证实。 在SBT/PT界面附近的不希望的第二相化合物的形成已被观察到与Ti层的试样，这被推测是自发极化的显着退化。相反，钽物种被发现表现出纯铋层状结构。
The effects of titanium (Ti) and tantalum (Ta) adhesion layers on the ferroelectric and microstructural properties of sol-gel-derived SrBi2Ta2O9 (SBT) films are investigated. It is found that the atoms from the adhesion layer play a significant role in the resultant microstructures and physical properties of SBT films. The electron spectroscopy for chemical analysis clearly indicates that both the Ti and Ta atoms of adhesion layers have out-diffused behavior onto the surface of bottom-electrode Pt films after a thermal treatment of 750 °C, 1 min. Various out-diffused species do cause the distinct properties of SBT films, which are confirmed by the results of surface analysis and polarization-electric field (P-E) measurements. The formation of undesirable second phase compounds near the SBT/PT interface has been observed in specimens with Ti layer, and it is speculated to be the significant degradation of spontaneous polarization. On the contrary, Ta species are found to exhibit the pure bismuth-layered st...