Ti1-xAlxN, Ti1-xZrxN and Ti1-xCrxN films synthesized by the AIP method
Ti1-xAlxN, Ti1-xZrxN and Ti1-xCrxN films synthesized by the AIP method
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DOI：
10.1016/s0257-8972(00)00737-4
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发表时间：
2000-10-02
影响因子：
5.4
通讯作者：
Suzuki, T
中科院分区：
文献类型：
--
作者：
Hasegawa, H;Kimura, A;Suzuki, T
采用电弧离子镀（AIP）方法制备了Ti_（1-x）Al_xN、Ti_（1-x）Zr_xN和Ti_（1-x）Cr_xN薄膜，研究了薄膜的显微硬度和晶格常数。当x = 0.6-0.7时，Ti_（1-x）Al_xN薄膜的晶体结构由NaCl转变为纤锌矿结构，而Ti_（1-x）Cr_xN和Ti_（1-x）Zr_xN薄膜在所有x值下均保持立方结构。随着含量x的增加，Ti 1-xAlxN和Ti 1-xCrxN的晶格参数分别从4.23埃（x = 0）单调下降到4.17埃（x = 0.6）和4.16埃（x = 1.0）。另一方面，Ti 1-xZrxN薄膜的晶格参数从4.23埃（x = 0）单调增加到4.58埃（x = 1.0）。Ti 1-xAlxN、Ti 1-xZrxN和Ti（1-x）Ci（x）N薄膜的最大显微硬度分别为Hv 3200（x = 0.6）、3000（x = 0.5）和3000（x = 0.2）。(C)2000年由Elsevier Science S.A.出版。All rights reserved.
Ti1-xAlxN, Ti1-xZrxN and Ti1-xCrxN films were synthesized by changing the contents, x values, using the are ion plating (AIP) method and investigated on micro-Vickers hardness and lattice parameter. The crystal structure of Ti1-xAlxN films changed from the NaCl into wurtzite type at x = 0.6-0.7, while Ti1-xCrxN and Ti1-xZrxN kept the cubic structures with all x values. With increasing content x, the lattice parameters of Ti1-xAlxN and Ti1-xCrxN monotonously decreased from 4.23 Angstrom (x = 0) down to 4.17 Angstrom (x = 0.6) and to 4.16 Angstrom (x = 1.0), respectively. On the other hand, the lattice parameters of Ti1-xZrxN films monotonously increased from 4.23 Angstrom (x = 0) up to 4.58 Angstrom (x = 1.0). The maximum micro-hardness of Ti1-xAlxN, Ti1-xZrxN and Ti(1-x)Ci(x)N films were Hv 3200 (x = 0.6), 3000 (x = 0.5) and 3000 (x = 0.2), respectively. (C) 2000 Published by Elsevier Science S.A. All rights reserved.