Laser‐beam deflection measurements and modeling of pulsed laser ablation rate and near‐surface plume densities in vacuum
Laser‐beam deflection measurements and modeling of pulsed laser ablation rate and near‐surface plume densities in vacuum
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DOI：
10.1063/1.349660
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发表时间：
1991-07
影响因子：
3.2
通讯作者：
P. Ventzek;R. Gilgenbach;D. M. Heffelfinger;J. Sell
中科院分区：
文献类型：
--
作者：
P. Ventzek;R. Gilgenbach;D. M. Heffelfinger;J. Sell
利用高达10J/cm2的248 nm准分子激光对聚对苯二甲酸乙二酯(PET)表面的烧蚀材料进行了定量测量，测量方法是真空中的HeNe光束偏转和空气中的光声深度剖析。HeNe激光光束偏转测量了存在于烧蚀羽流中的气相材料的密度。光声深度剖析是一种非侵入性的诊断方法，可以直接测量激光消融的蚀刻深度。提出了一种描述激光偏转信号的流体动力学模型，该模型由一个中心稀疏波组成，该稀疏波反射出PET表面。从这些测量中，可以估计出烧蚀物种的初始温度。
Quantitative measurements of ablated material from the surface of polyethyleneterephthalate (PET) by 248‐nm excimer laser fluences up to 10 J/cm2 are performed by HeNe laser‐beam deflection in vacuum and by photoacoustic depth profiling in air. HeNe laser‐beam deflection measures the density of gas phase material present in the ablation plume. Photoacoustic depth profiling is a nonintrusive diagnostic that directly measures the etch depths from laser ablation. A hydrodynamic model consisting of a centered rarefaction wave that reflects off the PET surface is shown to describe the laser deflection signals. From these measurements an estimate of the initial temperature of the ablated species is found.