Substrate effects on the CVD growth of MoS2 and WS2
Substrate effects on the CVD growth of MoS2 and WS2
复制标题
基材对 MoS2 和 WS2 CVD 生长的影响
DOI:
10.1007/s10853-019-03993-9
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发表时间:
2020
影响因子:
4.5
通讯作者:
Peng Yang
中科院分区:
文献类型:
--
作者:
Hang Yin;Xudong Zhang;Jiangwei Lu;Xuemin Geng;Yanfen Wan;Mingzai Wu;Peng Yang
Chemical vapor deposition (CVD)-grown 2D materials like MoS2and WS2have been widely used for research and application. Here, we study substrates’ effects on CVD-grown MoS2and WS2. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.