Two simple micromixers based on silicon

Two simple micromixers based on silicon
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DOI:
10.1088/0960-1317/8/2/020
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发表时间:
1998-06
影响因子:
2.3
通讯作者:
M. Koch;D. Chatelain;A. Evans;A. Brunnschweiler
M. Koch;D. Chatelain;A. Evans;A. Brunnschweiler
中科院分区:
工程技术4区
文献类型:
--
作者:
M. Koch;D. Chatelain;A. Evans;A. Brunnschweiler

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本文报告了两种微混合器的建模、制造和测试。由于微毛细管中的雷诺数较小,因此该装置采用的混合原理是扩散。第一个混合器将主流分离成部分流,这些部分流横向交替以增加液体之间的边界表面。第二个混合器通过将一种液体注入另一种液体来叠加两种流体。该制造技术基于硅蚀刻和与 Pyrex 玻璃的阳极键合。通过混合酚酞溶液和溶解在水中的氨来验证混合器的性能。在大约 4 kPa(横向混合)和 7 kPa(垂直混合)的压力以及大约 1 的流速下实现了合理的混合。将测量结果与 CFD 模拟器的扩散混合模拟进行比较,观察到两者一致。
This paper reports modelling, fabrication and testing of two micromixers. The principle of mixing used for the devices was diffusion because of the small value of the Reynolds number in microcapillaries. The first mixer separates the main flow into partial flows, which are laterally alternated in order to increase the boundary surface between the liquids. The second mixer superposes two fluids by injection of one liquid into the other. The fabrication technology is based on etching of silicon and anodically bonding with Pyrex glass. The performance of the mixers has been verified by mixing phenolphthalein solution and ammonia dissolved in water. Reasonable mixing was achieved at pressures of around 4 kPa (lateral mixing) and 7 kPa (vertical mixing) with flow rates of approximately 1 . The measurements were compared with diffusive mixing simulations with a CFD simulator and agreement of both was observed.