Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target
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DOI：
10.1063/1.2820451
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发表时间：
2007-12
期刊：
Applied Physics Letters
影响因子：
4
通讯作者：
Y. Ueno;G. Soumagne;A. Sumitani;A. Endo;T. Higashiguchi
Y. Ueno;G. Soumagne;A. Sumitani;A. Endo;T. Higashiguchi
中科院分区：
物理与天体物理2区
文献类型：
--
作者：
Y. Ueno;G. Soumagne;A. Sumitani;A. Endo;T. Higashiguchi

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研究了CO2激光脉冲辐照Sn腔靶后，13.5nm极紫外（EUV）波段的带内转换效率（CE）的增强。平面Sn靶产生约2%的带内CE，而腔靶的使用显著增强了EUV发射能量和EUV CE。对于深度为200μm的Sn腔靶，观察到4%的EUV CE，这是迄今报道的最高值之一。
We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, the use of cavity targets significantly enhanced the EUV emission energy and the EUV CE. An EUV CE of 4% was observed for a Sn cavity target with a depth of 200μm which is one of the highest values ever reported.