Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications
Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications
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DOI：
10.1109/jmems.2010.2052093
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发表时间：
2010-08-01
影响因子：
2.7
通讯作者：
Brand, Oliver
中科院分区：
文献类型：
--
作者：
Beardslee, Luke Armitage;Addous, Assim M.;Brand, Oliver
提出了一种热激励和压电检测的体微机械悬臂梁的面内弯曲谐振模式。通过剪切周围的流体而不是对其施加法向应力，平面内模式杠杆在流体环境中表现出减少的附加流体质量效应和改善的品质因数。在这封信中，不同的悬臂梁几何形状的面内谐振频率从50 kHz到2.2 MHz进行了测试，与空气中的质量因数高达4200和67在水中。
Thermally excited and piezoresistively detected bulk-micromachined cantilevers vibrating in their in-plane flexural resonance mode are presented. By shearing the surrounding fluid rather than exerting normal stress on it, the in-plane mode cantilevers exhibit reduced added fluid mass effects and improved quality factors in a fluid environment. In this letter, different cantilever geometries with in-plane resonance frequencies from 50 kHz to 2.2 MHz have been tested, with quality factors as high as 4200 in air and 67 in water.