Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump
Fabrication and Basic Characterization of a Piezoelectric Valveless Micro Jet Pump
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DOI：
10.1143/jjap.47.8615
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发表时间：
2008-11
影响因子：
1.5
通讯作者：
Katsuhiko Tanaka;V. Dau;Ryohei Sakamoto;T. X. Dinh;D. Dao;S. Sugiyama
中科院分区：
文献类型：
--
作者：
Katsuhiko Tanaka;V. Dau;Ryohei Sakamoto;T. X. Dinh;D. Dao;S. Sugiyama
设计并制作了一种具有新颖流道结构的压电驱动无阀微射流泵。该微射流泵结构简单，由锆钛酸铅（PZT）膜片和流道组成。流动通道的设计集中在由泵室的颈部以及一个出口和两个相对的入口通道形成的交叉接头上。该结构允许在每个泵振动周期期间通道内的流体阻力和流体动量的差异。为了确认泵的操作，使用聚甲基丙烯酸甲酯作为基板和传统的机械加工技术制造了一个原型。制备了喷嘴深度为0.5和0.2 mm的两种泵，并研究了喷嘴深度对流量的影响。泵室直径为11.8 mm，深度为0.5 mm，体积为0.055 cm 3。当通过30 Vp-p的正弦电压以约6 kHz的谐振频率驱动泵时，在400 Pa下获得17 ml/min的最大流速。
A piezoelectric-driven valveless micro jet pump with a novel channel structure has been designed and fabricated. The simple structure micro jet pump consists of a lead zirconate titanate (PZT) diaphragm and flow channels. The design of the flow channels focuses on a cross junction formed by the neck of the pump chamber and one outlet and two opposite inlet channels. This structure allows differences in fluidic resistance and fluidic momentum inside the channels during each pump vibration cycle. To confirm the pump operation, a prototype was fabricated using polymethyl methacrylate as a base plate and a conventional machining technique. Two types of pump with nozzle depths of 0.5 and 0.2 mm were prepared, and the depth effect on the flow rate was investigated. The pump chamber has an 11.8 mm diameter, a 0.5 mm depth, and a volume of 0.055 cm3. The maximum flow rate of 17 ml/min at 400 Pa was obtained when the pump was driven at a resonant frequency of approximately 6 kHz by a sinusoidal voltage of 30 Vp–p.