Stacked ARROW vertical coupler with large tolerance and short coupling length for three-dimensional interconnects
Stacked ARROW vertical coupler with large tolerance and short coupling length for three-dimensional interconnects
复制标题
堆叠式 ARROW 垂直耦合器，具有大公差和短耦合长度，适用于三维互连
DOI：
10.1049/el:19981305
复制
发表时间：
1998
影响因子：
1.1
通讯作者：
Y. Kokubun
中科院分区：
文献类型：
--
作者：
Ikuta Shigenori;S. Kubota;W. Pan;S. Chu;Y. Kokubun
设计了一种用于三维光互连的紧凑型ARROW型垂直耦合器，该耦合器具有较大的制造公差和较短的耦合长度。实验表明，该耦合器耦合长度很短，仅为350 μ/m，耦合效率高达86%。
A compact ARROW-type vertical coupler for three dimensional optical interconnects has been designed which has large fabrication tolerances and a short coupling length. A very short coupling length of 350 /spl mu/m and large coupling efficiency of 86% have been experimentally demonstrated.