Fabrication of High-Performance Lead Zirconate Titanate Actuators Using the Microwave and Hot-Press Hybrid Sintering Processes
Fabrication of High-Performance Lead Zirconate Titanate Actuators Using the Microwave and Hot-Press Hybrid Sintering Processes
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DOI：
10.1143/jjap.40.4611
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发表时间：
2001-07
影响因子：
1.5
通讯作者：
H. Takahashi;Kazuaki Kato;J. Qiu;J. Tani;K. Nagata
中科院分区：
文献类型：
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作者：
H. Takahashi;Kazuaki Kato;J. Qiu;J. Tani;K. Nagata
在我们以前的工作中，已经表明，28 GHz的微波烧结工艺可以提高压电致动器的性能。改进的性能包括更大的输出力，更高的强度和更大的机电耦合系数。性能的改善归因于快速加热抑制晶粒生长和内部加热改善显微组织。由于微波烧结过程中功率较大且加热均匀，烧结时间缩短为传统工艺的1/10。为了进一步提高锆钛酸铅（PZT）驱动器的性能，将微波烧结工艺与热压烧结工艺相结合，研究了复合工艺的烧结条件。结果表明，微波烧结与热压烧结相结合的工艺可以提高PZT陶瓷的烧结性能。特别地，发现压电常数d31可以提高多达30%。
It has been shown in our previous work that the 28 GHz microwave sintering process can improve the performances of piezoelectric actuators. The improved performances include larger output force, higher strength and a larger electromechanical coupling factor. The improvement in performances is attributed to the repression of grain growth due to rapid heating and improvement of the microstructure because of internal heating. The sintering time was reduced to 1/10 the time needed for the conventional technology due to the larger power and uniform heating in the microwave sintering process. In this study, the microwave sintering process was combined with the hot-press sintering process for further improvement of the performances of lead zirconate titanate (PZT) actuators and the sintering conditions of the hybrid process were investigated. It was confirmed that the combination of microwave and hot-press sintering processes can improve the performances of sintered PZT. In particular, it was found that the piezoelectric constant d31 could be improved by as much as 30%.