Influence of growth rate and temperature on InP/GaInAs interface structure analyzed by X-ray CTR scattering measurement

Influence of growth rate and temperature on InP/GaInAs interface structure analyzed by X-ray CTR scattering measurement
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X射线CTR散射测量分析生长速率和温度对InP/GaInAs界面结构的影响

DOI:
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发表时间:
2009
期刊:
影响因子:
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通讯作者:
and Y. Takeda
and Y. Takeda
中科院分区:
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文献类型:
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作者:
H. Tameoka;A. Mori;M. Tabuchi;and Y. Takeda

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