Improved Carrier Mobility of Sn-Doped Ge Ultrathin (<50nm) Films on Insulator by a-Si Capping in Solid-Phase Crystallization

Improved Carrier Mobility of Sn-Doped Ge Ultrathin (<50nm) Films on Insulator by a-Si Capping in Solid-Phase Crystallization
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通过固相结晶中的 a-Si 覆盖提高绝缘体上掺锡 Ge 超薄 (<50nm) 薄膜的载流子迁移率

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发表时间:
2022
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通讯作者:
and Taizoh Sadoh
and Taizoh Sadoh
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文献类型:
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作者:
Takaya Nagano;Ryutaro Hara;Kenta Moto;Keisuke Yamamoto;and Taizoh Sadoh

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