Electrostatic bending actuators with a liquid filled nanometer scale gap
Electrostatic bending actuators with a liquid filled nanometer scale gap
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DOI：
10.1109/memsys.2017.7863369
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发表时间：
2017
期刊：
影响因子：
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通讯作者：
M. Gaudet;S. Uhlig;M. Stolz;S. Arscott;H. Conrad;S. Langa;B. Kaiser;H. Schenk
中科院分区：
文献类型：
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作者：
M. Gaudet;S. Uhlig;M. Stolz;S. Arscott;H. Conrad;S. Langa;B. Kaiser;H. Schenk
我们报告了通过将液体插入纳米系统中，硅基纳米静电驱动（NED）结构[1]的静电驱动的显著改进。电介质液体在电极间隙中提供绝缘的、高介电常数的可变形介质，其增强了每单位施加的电压性能所产生的力。该研究表明，小体积的液体（微流体/纳米流体）可以插入到微和纳米机电系统（MEMS/NEMS）中，以将系统的性能提高到2.75。
We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an insulating, high dielectric constant deformable medium in the electrode gaps that enhances the generated force per unit-applied volt performance. The study demonstrates that small volumes of liquids (microfluidics/nanofluidics) can be inserted into micro and nanoelectromechanical systems (MEMS/NEMS) to enhance systems' performances up to 2.75.