A MEMS Accelerometer Based on Wavelength Modulation Using an Integrated Blazed Grating
A MEMS Accelerometer Based on Wavelength Modulation Using an Integrated Blazed Grating
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基于集成闪耀光栅波长调制的 MEMS 加速度计
DOI：
10.1109/jsen.2018.2880784
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发表时间：
2019-02-01
影响因子：
4.3
通讯作者：
Zhong, Shaolong
中科院分区：
文献类型：
--
作者：
Long, Liang;Guo, Zhihui;Zhong, Shaolong
报道了一种以集成闪耀光栅作为波长调制元件的微机电系统（MEMS）光纤加速度计。该加速度计包括V形悬臂梁、垂直对称的检验质量块和集成闪耀光栅。加速度计的原型制作与体微加工工艺和测试。加速度计的带宽为200 Hz。在± 5.2g的测量范围内，100 Hz时的光学灵敏度和非线性度分别为1.63nm/g和0.06%。x轴和y轴交叉轴灵敏度分别为2%和4.5%。在-20 ℃-200 ℃的全温度范围内，温度灵敏度为2.8 pm/℃。由于上述特性，所提出的MEMS加速度计可以具有广泛的应用，例如轨道交通和姿态航向传感应用。
This paper reports a microelectromechanical systems (MEMS) optical fiber accelerometer with an integrated blazed grating as a wavelength modulation component. The accelerometer includes a V-shaped cantilever beam, a vertically symmetrical proof mass, and an integrated blazed grating. The accelerometer prototype is fabricated with bulk micromachining processes and is tested. The bandwidth of the accelerometer is 200 Hz. The optical sensitivity and nonlinearity of the measure range +/- 5.2 g are 1.63 nm/g at 100 Hz and 0.06%, respectively. The x- and y-axes cross-axis sensitivities are 2% and 4.5%, respectively. In the full temperature range of -20 degrees C-200 degrees C, the temperature sensitivity is 2.8 pm/degrees C. Thanks to the above-mentioned characteristics, the proposed MEMS accelerometer could have a wide range of applications, such as rail traffic and attitude heading sensing applications.