Spontaneous Formation of Periodic Nanostructures by Localized Dynamic Wrinkling
Spontaneous Formation of Periodic Nanostructures by Localized Dynamic Wrinkling
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DOI：
10.1021/nl102694a
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发表时间：
2010-10-01
期刊：
影响因子：
10.8
通讯作者：
Guo, L. Jay
中科院分区：
文献类型：
--
作者：
Ahn, Se Hyun;Guo, L. Jay
微/纳米周期结构作为关键功能元件在显示、光学和生物工业中有着广泛的应用。我们提出了一种新的纳米图案化方法--局部动态图案化（Low-localized dynamic patelling），其通过简单地在涂覆在聚合物层上的薄金属表面上滑动硬材料的平坦边缘来连续地产生微/纳米级金属光栅。本文中提出的LOW工艺是一种蚀刻和模板，基于纳米尺度条纹现象的自由纳米图案化技术这种简单的工艺可以自发形成大面积金属光栅，其周期性可控，从微米到120 nm
Micro/nanoscale periodic structures are widely used in display, optics and bio industries as key functional elements We present a novel nanopacterning method, localized dynamic wrinkling (LOW), which creates micro/nanoscale metal gratings continuously by simply sliding a flat edge of a hard material over a thin metal surface coated on a polymer layer The LOW process presented in this paper is an etching- and template-free nanopatterning technology based on nanoscale wrinkling phenomenon This simple process enables spontaneous formation of large-area metal gratings with controllable periodicity from micrometer down to 120 nm